Krytox™ high-performance lubricants for electronics and semiconductors

In electronics and semiconductor manufacturing, contamination can hinder equipment accuracy, repeatability of operations and equipment life. High-performance lubricants help reduce contaminants and outgassing when used in vacuum pumps and clean rooms where electronic and semiconductor components are assembled. This helps improve yields while extending the operating life of the equipment.

Krytox™ high-performance lubricants are also used for a variety of assembly line components, including:

• Bearings
• Valves
• Seals
• O-ring
• Chains
• Compressors
• Gear boxes
• Mechanical pumps

Krytox™ electronics lubricants offer excellent safety and protection for the electronics and semiconductor industry. These long-lasting oils and greases are routinely used in dry and wet pumps, vacuum systems, clean rooms, robotic systems, and more. In these applications, Krytox™ high-performance electronics lubricants are recognized by all major vacuum pump manufacturers and OEM equipment suppliers and meet or exceed warranty requirements.

Highly stable and safe electronics lubricants for cleanrooms

Krytox™ high-performance lubricants withstand extreme temperatures and pressures that hydrocarbon, silicone, and chlorofluorocarbon-based greases cannot match, providing a more stable environment for sensitive electronic components. Since chemicals and reactive materials can also threaten semiconductors and electronics, the use of a lubricant incompatible with these substances can damage mechanical components. Krytox™ high-performance lubricants are chemically and biologically inert, thus oxygen-compatible and non-reactive to almost all chemicals, plastics, metals and elastomers.
In addition to providing stability and safety in harsh conditions, Krytox™ lubricants also have a long service life, so components do not require frequent re-lubrication.
Other properties that make Krytox™ high-performance lubricants suitable for use in the electronics and semiconductor industries include:

• Excellent vapor pressure to withstand high temperatures, -15 to 300 °C (5 to 572 °F), up to 10-13 mmHg
• Not reactive to acidic or caustic detergents and disinfectants, steam and moisture
• Safe to use: no volatile organic compounds (VOCs) or chlorine
  Minimal environmental impact: fluids can be regenerated
• Compatible with chemicals commonly used in industry

Krytox™ VPF

Krytox™ VPFs are used in applications where conventional vacuum pump oils can cause safety problems. Krytox™ VPF is highly stable, which limits disposal and maintenance problems. It is also nonflammable and reduces the possibility of fire in pumps. In addition, Krytox™ VPFs do not contain acetal groups within them, so they are not susceptible to Lewis acid attack, a critical element for semiconductor manufacturing. Due to such unique properties, these lubricants are widely demanded by major vacuum pump manufacturers.